“Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range”
Sensors and Actuators A Physical, No. 55 - 2, pp. 91-97, 1996.
DOI: 10.1016/s0924-4247(97)80062-3
PUBLICATIONS
Papers, books, talks and other publications by Hidekuni Takao in 1996.
Sensors and Actuators A Physical, No. 55 - 2, pp. 91-97, 1996.
DOI: 10.1016/s0924-4247(97)80062-3