“Three Dimensional Vector Accelerometer using SOI Structure for High Temperature”
IEICE Transactions on Electronics, Vol. J78, C-2, No.10, pp. 495-505, 1995.
(An English translation was published in the Wiley journal listed below.)
H. Takao, Y. Matsumoto, H. Tanaka, H. Seo, M. Ishida, and T. Nakamura
“Three Dimensional Vector Accelerometer using SOI Structure for High Temperature”
Electronics and Communication in Japan, Part2, Vol. 79, No.3, pp. 495-505, 1996.
Original citation (Japanese)
“SOI構造を用いた高温用三次元加速度ベクトルセンサ”
高尾 英邦,松本 佳宣,田中 秀一,徐 煕敦,石田 誠,中村 哲郎
電子情報通信学会論文誌, Vol. J78, C-2, No.10, pp. 495-505, 1995.
(英訳論文として下記Wiley誌に掲載)
H. Takao, Y. Matsumoto, H. Tanaka, H. Seo, M. Ishida, and T. Nakamura
“Three Dimensional Vector Accelerometer using SOI Structure for High Temperature”
Electronics and Communication in Japan, Part2, Vol. 79, No.3, pp. 495-505, 1996.