“Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range”
Sensors and Actuators A Physical, No. 55 - 2, pp. 91-97, 1996.
PUBLICATIONS
高尾英邦の1996年の論文・著書・講演等を掲載しています。
Sensors and Actuators A Physical, No. 55 - 2, pp. 91-97, 1996.