“Shape Deterioration of Mesa Structures in Post-CMOS Anisotropic Etching of Silicon Microsensors: An Experimental Study”
Sensors and Actuators A Physical, vol.86, no.1-2, pp.115-121, 2000.
PUBLICATIONS
Publications in 2000
Papers, books, talks and other publications by Hidekuni Takao in 2000.
English titles and publication details are provided for Japanese-language works. Expand “Original citation (Japanese)” to view the original reference.
Journal Articles2 entries
“Excess Noise Characteristics of Hydrogenated Amorphous Silicon Avalanche Photodiode Filmes Using Functionally Graded Structure”
Japanese Journal of Applied Physics, vol. 39, Part 1, No. 4B, pp. 204-208, April 2000.
Peer-Reviewed International Conference Papers2 entries
“A Concept and Design of Integrated Temperature Control System in SOI Sensors for Precision Operation over a Wide Temperature Range”
Proceedings of International Conference on Electrical Engineering 2000 (ICEE2k), pp. 259-262, Kitakyusyu, Japan, July 24-27, 2000.
“Fabrication of A Three-Axis Accelerometer Integrated with Commercial 0.8µm-CMOS Circuits”,
Proceedings of IEEE The 13th Annual International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2000), pp.781-786, Miyazaki, Japan, Jan. 23-27, 2000.
Books1 entry
SENSORS Update, Vol. 6
Contributed section: Chapter 16: SOI Sensors, pp. 302-331
WILEY-VCH Verlag GmbH, published 2000
Original citation (Japanese)
SENSORS Update, Vol. 6
M. Ishida, Y. Matsumoto, H. Takao （分担執筆）
担当箇所：Chapter 16: SOI Sensors, pp. 302-331
WILEY-VCH Verlag GmbH, 2000年出版