“Shape Deterioration of Mesa Structures in Post-CMOS Anisotropic Etching of Silicon Microsensors: An Experimental Study”
Sensors and Actuators A Physical, vol.86, no.1-2, pp.115-121, 2000.
PUBLICATIONS
2000年の研究業績
高尾英邦の2000年の論文・著書・講演等を掲載しています。
原著論文2件
“Excess Noise Characteristics of Hydrogenated Amorphous Silicon Avalanche Photodiode Filmes Using Functionally Graded Structure”
Japanese Journal of Applied Physics, vol. 39, Part 1, No. 4B, pp. 204-208, April 2000.
全査読付き国際会議論文2件
“A Concept and Design of Integrated Temperature Control System in SOI Sensors for Precision Operation over a Wide Temperature Range”
Proceedings of International Conference on Electrical Engineering 2000 (ICEE2k), pp. 259-262, Kitakyusyu, Japan, July 24-27, 2000.
“Fabrication of A Three-Axis Accelerometer Integrated with Commercial 0.8µm-CMOS Circuits”,
Proceedings of IEEE The 13th Annual International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2000), pp.781-786, Miyazaki, Japan, Jan. 23-27, 2000.
著書1件
SENSORS Update, Vol. 6
担当箇所：Chapter 16: SOI Sensors, pp. 302-331
WILEY-VCH Verlag GmbH, 2000年出版