“A Pneumatically Actuated Full In-Channel Microvalve with MOSFET-Like Function in Fluid Channel Networks”
IEEE/ASME Journal of Microelectromechanical Systems, vol. 11, no. 5, pp. 421-426, Oct. 2002.
PUBLICATIONS
Papers, books, talks and other publications by Hidekuni Takao in 2002.
English titles and publication details are provided for Japanese-language works. Expand “Original citation (Japanese)” to view the original reference.
IEEE/ASME Journal of Microelectromechanical Systems, vol. 11, no. 5, pp. 421-426, Oct. 2002.
IEICE Transactions on Electronics, vol. E85-C, no. 7, pp. 1499-1505, July 2002.
Japanese Journal of Applied Physics, vol. 41, pp. 2552-2555, 2002.
Sensors and Actuators A Physical, vol. 97-98, pp. 709-715, 2002.
Journal of Sensor Science and Technology, Vol. 11, No. 1, pp. 1-8, 2002.
Sensors and Actuators B Chemical, vol. 83, pp. 77-81, 2002.
2002 International Electron Device Meeting (IEEE IEDM 2002), pp.401-404, San Francisco, USA, Dec. 9-11, 2002.
Proceedings of International Conference on Smart Materials Structures and Systems (ISSS-SPIE2002), pp. 302-309, Bangalore, India, Dec., 2002.
Denshi Zairyo (Electronic Materials), Vol. 41, No. 5, pp. 40-43, May 2002.
“MEMSの最新技術動向と応用展開:血球計数用平面状センサへの応用”
衣斐 寛之,佐竹 大輔,高尾 英邦,石田 誠
電子材料,第41巻,第5号,pp. 40-43,2002年5月.